I'm not sure the tool is the the issue here?

A master carpenter with entry level tools will still do a much better job than a klutz with professional grade tools.

https://www.datacenterdynamics.com/en/news/intel-completes-assembly-of-high-na-euv-lithography-tool-at-oregon-fab/

They went through a phase where they were getting awful yields. No idea why they had those problems and others didn't.